
Nitrogen trifluoride is an inorganic compound with the chemical formula NF3. It is a colorless gas at normal temperature and pressure. It is insoluble in water.
It is a strong oxidant and an excellent plasma etching gas in the microelectronics industry. It can also be used as a high-energy fuel.
Nitrogen trifluoride info:
| Names | |
|---|---|
| English name
Nitrogen trifluoride
|
|
| Other names
Nitrogen fluoride
Trifluoramine Trifluorammonia |
|
| Identifiers | |
|
3D model (JSmol)
|
|
| ChEBI | |
| EC Number |
|
| 1551 | |
|
PubChem CID
|
|
| RTECS number |
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| Properties | |
| NF3 | |
| Molar mass | 71.00 g/mol |
| Appearance | colorless gas |
| Odor | moldy |
| Density | 3.003 kg/m3 (1 atm, 15 °C) 1.885 g/cm3 (liquid at b.p.) |
| Melting point | −207.15 °C (−340.87 °F; 66.00 K) |
| Boiling point | −129.06 °C (−200.31 °F; 144.09 K) |
| 0.021 g/100 mL | |
| Vapor pressure | 44.0 atm[1](−38.5 °F or −39.2 °C or 234.0 K)[a] |
|
Refractive index (nD)
|
1.0004 |
| Structure | |
| trigonal pyramidal | |
| 0.234 D | |
| Thermochemistry | |
|
Heat capacity (C)
|
53.26 J/(mol·K) |
|
Std molar
entropy (S⦵298) |
260.3 J/(mol·K) |
|
Std enthalpy of
formation (ΔfH⦵298) |
−31.4 kcal/mol[2] −109 kJ/mol[3] |
|
Gibbs free energy (ΔfG⦵)
|
−84.4 kJ/mol |
Nitrogen trifluoride info:
| CAS No.: | 232-007-1 |
|---|---|
| Formula: | NF3 |
| EINECS: | 232-007-1 |
| Constituent: | NF3 |
| Grade Standard: | Electronic Grade |
| Chemical Property: | Inflammable Gas |
| Model NO. | NF3 |
| Cylinder | 40L/50kg |
| Electron Grade | Electron Grade |
| Purity | 99.999% |
| Transport Package | Sea Transportation |
| Specification | 40L 99.999% |
| Origin | China |
| Production Capacity | 2000piece/Month |